Spectra Gases has designed gas delivery systems specific to the excimer laser industry which provide excimer laser users with long service life and peak performance. Spectra Gases' halogen gas delivery panels are made of stainless steel components with highly polished 316L electro-polished tubing. A cross-purge design is employed to maintain purity in the system during cylinder changeover. Inert gas panels are constructed using only high purity brass or stainless steel. All excimer laser gas regulators employ stainless steel diaphragms and all valves are pack-less.